The nB4 is a generation ahead of the current competition and with its field-proven performance has gained acceptance in the market place. It has excellent stability and has demonstrated an average uptime of greater than 93%. NanoBeam now introduces the nB5 which has been developed to further reduce delivery times and service costs.

nB5 development aims:

• Refine design and components to reduce routine service requirements.
• Achieve a machine-fault-downtime of less than 5% annually.
• Enhance performance
• Facilitate volume production.

Specification:

• Beam Voltage range 20kV - 100kV
• Feature size on resist <8nm
• Stitching/overlay error <25nm for 500um field
• Automatic loading 5 chuck airlock system

The nB5 system will provide a platform for further development to high deflection speed and further integrated electronics.